Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Microsystem Technologies
سال: 2014
ISSN: 0946-7076,1432-1858
DOI: 10.1007/s00542-014-2127-6